微纳制造
2007-1
科学出版社
杰克逊
699
1150000
纳米技术是当前科学研究与工业开发的热门领域之一。本书全面阐述了微纳器件的设计和制造方面的知识，以及在设计和制造时所要考虑的诸多因素。书中涵盖了多种制造技术，包括微纳制造技术、体和表面微加工技术、LiGA技术、薄膜沉积技术、纳加工技术等。 本书内容丰富，讲解透彻，是一本相关领域电子工程师、材料科研工作者开发微纳米材料应用的全面的指南，同时也可作为微纳米机械和微纳米技术专业研究生的参考书。
Preface1. Principles of Micro-and Nanofabrication 1.1 Introduction 1.2 Material Removal Rates 1.3 Conclusions 1.4 Problems References2. Microfabrication Using X-ray Lithography 2.1 Introduction 2.2 X- ray Lithography 2.3 Synchrotron Radiation 2.4 Microfabrication Process 2.5 Methods of Resist Application 2.6 Exposure 2.7 Problems References3. Manufacturing High Aspect Ratio Microstructures 3.1 I ntrod uction 3.2 Dry Etching 3.3 Plasma Etching Processes 3.4 Characteristics of the Plasma 3.5 Etching of Microstructures 3.6 Micromachining High Aspect RatioMicrostructures 3.7 Micromolding 3.8 Micromolding Processes 3.9 Micromolding Tools 3.10 Micromold Design 3.11 MicromoldingApplications 3.12 Limitations of Micromolding 3.13 Fabrication of Moving Microstructures 3.14 Conclusions 3.15 Problems References4. Meso-micromachining 4.1 Introduction 4.2 Size Effects in Micromachining 4.3 Mechanism for Large Plastic Flow 4.4 Inhomogeneous Microstrains 4.5 Origins of the Size Effect 4.6 Meso-machining Processes 4.7 Problems References5. Mechanical Micromachining 5.1 Introduction 5.2 Microfluidic Systems 5.3 Theory of Micromachining 5.4 Experimental Micromachining 5.5 Micromachining Tool Design 5.6 High-Speed Air Turbine Spindles 5.7 Mechanical Design of Rotors 5.8 Discussion 5.9 Conclusions 5.10 Future Developments 5.11 Problems References6. Microgrinding 6.1 Introduction 6.2 Grinding Wheels 6.3 Conventional Grinding Processes 6.4 Precision Grinding Processes 6.5 Ultra Precision Grinding 6.6 Conclusions 6.7 Problems References7. Diamond Micro Cutting Tools 7.1 Introduction 7.2 Properties of Diamond 7.3 History of Diamond 7.4 CVD Diamond Technology 7.5 CVD Diamond Processes 7.6 Treatment of Substrate 7.7 Modification of HFCVD Process 7.8 Nucleation and Growth 7.9 Deposition on 3-D Substrates 7.10 Wear of Diamond 7.11 Time-Modulated CVD Diamond 7.12 Conclusions 7.13 Problems References8. Laser Micro- and NanofabricaUon 6.1 Introduction 8.2 Laser Fundamentals 8.3 Laser Microfabrication 8.4 Laser Nanofabrication 8.5 Conclusions 8.6 Problems References9. Micromachining Using Water Droplets 9.1 Introduction 9.2 Theory of Pulsed Liquid Impact 9.3 Impact by Water Drops 9.4 Modeling Machining Thresholds 9.5 Comparative Results 9.6 Material Removal Rates 9.7 Design of Water-Based Tools 9.8 Analysis of Space Frame 9.9 Mode Shapes of Tetrahedral Structure 9.10 Conclusions 9.11 Problems References10. Diamond Nanogrinding 10.1 Introduction 10.2 Piezoelectric Nanogrinding 10.3 Stress Analysis in Nanogrinding Grains 10.4 Fracture Dominated Wear Model 10.5 Nanogrinding 10.6 Porous Nanogrinding Tools 10.7 Laser Dressing of Tools 10.8 Future Directions 10.9 Problems References11. Nanomachining 11.1 Introduction 11.2 Nanometric machining 11.3 Theoretical Basis of Nanomachining 11.4 Implementation 11.5 Conclusions 11.6 Problems References12. Micro- and Nanomanufacturing 12.1 Introduction 12.2 Micromanufacturing 12.3 Nanomanufacturing 12.4 Commercialization Issues of Micro and Nanotechnologies 12.5 Future Developments 12.6 Problems ReferencesSubject Index
就是这样